Semiconductor Seals & Components
High-performance metal seals, bellows and critical components engineered for vacuum, UHP and high-purity applications.
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Etch & Deposition Chamber Seals
HELICOFLEX® and elastomer seals for process chambers
Vacuum Pump Seals
metal seals and mechanical seals for semiconductor vacuum pumps
UHP Gas & Chemical Delivery Seals
ultra-high purity seals for gas and chemical systems
Wafer Handling & Gate Valve Components
BELFAB® metal bellows and lift assemblies
ESC Pedestals
new and refurbished electrostatic chuck pedestals with advanced coatings
Product Range
Metal Seals
HELICOFLEX® spring-energized metal seals for vacuum pumps and gas/chemical delivery; UHV-level leak rates, reusable, unlimited storage life.
Spring-Energized Seals
C-FLEX®, E-FLEX®, O-FLEX® and machined metal seals for cryogenic, high-pressure and vacuum chamber sealing; sizes 1/8″ to 100″+.
Metal Bellows
BELFAB® edge-welded bellows for gate valves, wafer handling, feedthroughs and lift assemblies; OD 1/4″–18″, vacuum to 1000+ psi.
UHP/UHV Seals
ultra-high purity and ultra-high vacuum grade seals for gas delivery systems, process chambers and analytical instruments; low outgassing, particle-free.
ESC Pedestals
new and refurbished electrostatic chuck pedestals, heater pedestals and metal pedestal assemblies with advanced coatings.
Elastomer Seals
inflatable seals, molded seals and extruded profiles for door sealing and contamination isolation.
Mechanical Seals, Spiral Wound Gaskets & Graphite Seals
QUALISEAL®, VITAFLEX® and ORIGRAF® for pumps, valves and high-temperature equipment.
Our supply partner has 50+ years in semiconductor sealing
500,000+ bellows produced
12,000+ ESC pedestals